SEC Co., Ltd / SEC Europe Head Offcie / Nanotech Digital GmbH / Analysis report
Semiconductor material
SiO2, ZnO
sne-4500m plus
Key Strength of Table-Top SEM(4500M Plus) system by SEC Co.,Ltd
Max. 150,000x of magnification by miniaturizing modules
Able to scan images with high resolution of 5nm
Various detectors which create surface information images (SE), and material information images (BSE)
Able to get images of variable angles via Tilting -45°~90°, and easily analyze EDS
User-friendly optimized U.I
This acts as an insulating film, preventing leakage current between circuits, and at the same time acting as a dielectric, and acts as a protective film for the wafer in subsequent processes. The thermal oxidation method is mainly used as a method of coating an oxide film, and in this process, the technology has developed in a way to increase the respective oxidation efficiency.
There is a report that a general ZnO semiconductor exists as an n-type or that a p-type transfer characteristic is made in the presence of no-wire ZnO.
When the ZnO thin film was deposited, crystallinity appeared, and it can be seen that when the heat treatment was performed, oxygen cavities were generated and changed to amorphous characteristics.