SEC Co., Ltd / SEC Europe Head Offcie / Nanotech Digital GmbH / Analysis report
SEMICONDUCTOR
IC Chip
sne-4500m plus
Key Strength of Table-Top SEM(4500M Plus) system by SEC Co.,Ltd
Max. 150,000x of magnification by miniaturizing modules
Able to scan images with high resolution of 5nm
Various detectors which create surface information images (SE), and material information images (BSE)
Able to get images of variable angles via Tilting -45°~90°, and easily analyze EDS
User-friendly optimized U.I
SE(Secondary Electron) provides images with surface topography depicted in fine detail.
BSE(Back Scattered Electron) provides images with atomic weight contrast as brightness follows the elemental atomic number.
Tabletop SEM makes chip and wire bonding, stitch bonding, shape of chip, adhesive and substrate checking possible by inspection against a sliced sample.
SE/BSE Detector is installed originally for SEM image analysis and enables to diversify analysis condition depending on the nature of a specimen. Also, High/Low Vacuum mode is supported so sample analysis is available without metal coating of nonconductor sample in low vacuum mode. (Supports Charge-up Reduction mode
Tilt function: -45 to 90 degree
User-centric software interface provides an easy to learn and conveniently organized interface
High resolution SEM able to inspect image up to 150,000x by minimizing Module of Normal-SEM
Energy Dispersive Spectroscopy(EDS) is optionally for analyzing sample composition. EDS is used for qualitative and quantitative elemental analysis by detecting characteristic X-rays generated as a result of the electron beam excitation of the atomic structure. EDS Detectors can be installed on all SEC SEM models and are available with both compact, simplified EDS software or more advanced spectroscopy solutions, all from well known industry standard EDS suppliers
SDD Type – No LN2 required
Able to analyze light elements with good resolution
Main function include Elemental Mapping, Point analysis, Line scan, Automated reporting
User- Friendly interface with fast and simple manipulation
