SEC Co., Ltd / SEC Europe Head Offcie / Nanotech Digital GmbH / Analysis report


Nanopillars of WaferSE

For Solar cell, Battery, Nanoimprint

sne-4500m plus

Key Strength of Table-Top SEM(4500M Plus) system by SEC Co.,Ltd

Max. 150,000x of magnification by miniaturizing modules

Able to scan images with high resolution of 5nm

Various detectors which create surface information images (SE), and material information images (BSE)

Able to get images of variable angles via Tilting -45°~90°, and easily analyze EDS

User-friendly optimized U.I

High resolution

Fast vacuuming time


Stage tilt

(-45 to 90 degree)

Easy to learn

Nanopillars have been sought after for many applications.                                                                              For example, Si nanopillars have been used as nanoimprint lithography. also been used in solar cells and field-effect transistors.

The shape of each nanopillar can be visualized in Table Top SEM of SEC as images below,

 Showing a clear edge after the patterning and etching process.

It can know the surface, diameter, and height of the nanopillars, and it can also check the shape of the nanopillars.

It can be sufficiently used for research purposes or failure analysis by manufacturing new nanopillars. In addition, it is possible to obtain a satisfactory level of image compared to a high-performance SEM through a relatively inexpensive price.



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